The step towards an ultimate multifunctional tool for nanotechnology

The need for a combination of a number of observation and analytical methods in a single instrument minimizes the time consuming moving of the studied sample among several devices for different applications and avoids the navigation to the studied object with features in nanometer dimensions. The high-resolution Schottky FE SEM and Ga FIB that allow imaging in different signals were combined with SPM, which adds complementary surface images in-situ. The system can be equipped with a number of detectors for electrons, secondary ions, cathodoluminescence as well as analytical detectors for X-rays and time-of-flight spectrometer of secondary ions. Electron and ion lithography, electron and ion beam induced deposition, and FIB sputtering and slicing for 3D tomography can be performed. Several application examples illustrate the use of the tool.