Title :
Capacitive accelerometer laboratory using polymer-film rapid prototyping technology
Author :
Gellineau, A.A. ; Rastegar, A.J. ; Howe, R.T.
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA
Abstract :
We present a rapid prototyping substitute for silicon MEMS Fabrication, which allows students to understand the fundamental tradeoffs in designing a planar accelerometer. The laboratory uses commercially available polymer-films and a CO2 laser cutter for device fabrication and design validation.
Keywords :
accelerometers; capacitive sensors; carbon compounds; elemental semiconductors; laser beam cutting; microfabrication; microsensors; polymer films; rapid prototyping (industrial); silicon; thin film sensors; CO2; CO2 laser cutter; Si; capacitive accelerometer laboratory; planar accelerometer; polymer-film rapid prototyping technology; silicon MEMS fabrication; Accelerometers; Capacitance; Fabrication; Laser beam cutting; Sensitivity; Springs; Tungsten; MEMS educational laboratory; accelerometer design; capacitive sensors; low-cost fabrication; rapid prototyping;
Conference_Titel :
Interdisciplinary Engineering Design Education Conference (IEDEC), 2013 3rd
Conference_Location :
Santa Clara, CA
Print_ISBN :
978-1-4673-5113-3
DOI :
10.1109/IEDEC.2013.6526764
