Micromechanical test structures for the characterisation of electroplated NiFe cantilevers and their viability for use in MEMS switching devices

This paper presents the fabrication of a series of test devices designed to prove the viability of electroplated NiFe freestanding structures for use in magnetically actuated MEMS switches. Preliminary results show promising actuation responses and further release optimisation and testing will enable the quantitative measurement of the desired characteristics. In addition, this will potentially enable the mechanical characterisation of freestanding structures in other materials by means of magnetic actuation, simply by depositing small quantities of NiFe or other magnetic materials in convenient areas of existing devices.