On the length of THRU standard for TRL de-embedding on Si substrate above 110 GHz

Author

Orii, A. ; Suizu, M. ; Amakawa, Shuhei ; Katayama, Kengo ; Takano, Kyoya ; Motoyoshi, Mizuki ; Yoshida, Takafumi ; Fujishima, Minoru

Author_Institution

Grad. Sch. of Adv. Sci. of Matter, Hiroshima Univ., Higashi-Hiroshima, Japan

fYear

2013

fDate

25-28 March 2013

Firstpage

81

Lastpage

86

Abstract

It is known that the THRU standard (a transmission line) used for thru-reflect-line (TRL) calibration/de-embedding for S-parameter measurement has to be long enough that only a single electromagnetic mode propagates at its center for it to work reliably. But ideally, TRL standards should occupy as little precious silicon real estate as possible. This paper attempts to experimentally find out how long a THRU is long enough above 110GHz up to 170 GHz through measurements of transmission lines of various lengths. The results indicate that the length of a THRU should be at least 400 micrometers, excluding pads and pad-to-line transitions.

Keywords

S-parameters; calibration; elemental semiconductors; network analysers; silicon; standards; transmission lines; S-parameter measurement; Si; THRU standard; TRL de-embedding; pad-to-line transitions; single electromagnetic mode; thru-reflect-line calibration; thru-reflect-line network analyzer calibration; transmission line; Calibration; Power transmission lines; Scattering parameters; Silicon; Standards; Transmission line matrix methods; Transmission line measurements;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures (ICMTS), 2013 IEEE International Conference on

Conference_Location

Osaka, Japan

ISSN

1071-9032

Print_ISBN

978-1-4673-4845-4

Electronic_ISBN

1071-9032

Type

conf

DOI

10.1109/ICMTS.2013.6528150

Filename

6528150