Title :
Three- and four-point Hamer-type MOSFET parameter extraction methods revisited
Author_Institution :
Dept. of Microtechnol. & Nanosci., Chalmers Univ. of Technol., Gothenburg, Sweden
Abstract :
In this paper the three-point Hamer type and four-point Karlsson & Jeppson type MOSFET parameter extraction methods are revisited concerning robustness and selection of data points. The method for fitting models described by rational functions to measured data proposed by Hamming is also discussed and it is shown how this method calculates its weighted data points. An alternative method where MOSFET resistance values are used instead of current values for the extraction procedure is also investigated in an attempt to increase extraction method robustness. Finally, it is shown how the three point extraction method can be applied not only to the triode region but also to the MOSFET saturation region for separating parameters for the body effect and the velocity saturation.
Keywords :
MOSFET; semiconductor device models; Jeppson type MOSFET parameter extraction methods; MOSFET saturation region; body effect; data point selection; fitting models; four-point Hamer-type MOSFET parameter extraction methods; four-point Karlsson MOSFET parameter extraction methods; point extraction method; rational functions; three-point Hamer-type MOSFET parameter extraction methods; triode region; velocity saturation; weighted data points; Data models; Fitting; MOSFET; Mathematical model; Noise; Parameter extraction; Robustness; Direct parameter extraction; MOSFET models;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2013 IEEE International Conference on
Conference_Location :
Osaka, Japan
Print_ISBN :
978-1-4673-4845-4
Electronic_ISBN :
1071-9032
DOI :
10.1109/ICMTS.2013.6528161