Modeling of MEMS capacitive differential pressure sensor

Author

Eswaran, Parthasarathy ; Malarvizhi, S.

Author_Institution

Department of Electronics and Communication Engineering, SRM University, Kattankulathur, Kancheepuram Dt.-603203, Tamil Nadu, India

fYear

2013

fDate

20-21 March 2013

Firstpage

699

Lastpage

702

Abstract

In this paper, modeling of high sensitive capacitive differential pressure sensor (CDPS) structure was proposed. The-working principle of CDPS was explained. Different types of CDPS structure for aircraft altimeter were designed. Polymide square diaphragm membrane is used to sense the pressure. Simulation was carried out for the range of pressure from 116 mbar to 1100 mbar, which is equivalent to aircraft flying altitude. Analysis was done with simulation results for centre deflection sensitivity and capacitive sensitivity for different models of CDPS structure. From the simulated results an improved CDPS models with bossed diaphragm membrane shows linear characteristics. The deflection sensitivity and capacitive sensitivity are 10.912nm/mbar and 3.025fF/mbar respectively.

Keywords

Analytical models; Micromechanical devices; Sensitivity; Capacitive differential pressure sensor (CDPS); Deflection sensitivity; MEMS CDPS; Modeling of CDPS; Polymide diaphragm modeling; capacitive sensitivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits, Power and Computing Technologies (ICCPCT), 2013 International Conference on

Conference_Location

Nagercoil

Print_ISBN

978-1-4673-4921-5

Type

conf

DOI

10.1109/ICCPCT.2013.6528946

Filename

6528946