Title :
Modeling of MEMS capacitive differential pressure sensor
Author :
Eswaran, Parthasarathy ; Malarvizhi, S.
Author_Institution :
Department of Electronics and Communication Engineering, SRM University, Kattankulathur, Kancheepuram Dt.-603203, Tamil Nadu, India
Abstract :
In this paper, modeling of high sensitive capacitive differential pressure sensor (CDPS) structure was proposed. The-working principle of CDPS was explained. Different types of CDPS structure for aircraft altimeter were designed. Polymide square diaphragm membrane is used to sense the pressure. Simulation was carried out for the range of pressure from 116 mbar to 1100 mbar, which is equivalent to aircraft flying altitude. Analysis was done with simulation results for centre deflection sensitivity and capacitive sensitivity for different models of CDPS structure. From the simulated results an improved CDPS models with bossed diaphragm membrane shows linear characteristics. The deflection sensitivity and capacitive sensitivity are 10.912nm/mbar and 3.025fF/mbar respectively.
Keywords :
Analytical models; Micromechanical devices; Sensitivity; Capacitive differential pressure sensor (CDPS); Deflection sensitivity; MEMS CDPS; Modeling of CDPS; Polymide diaphragm modeling; capacitive sensitivity;
Conference_Titel :
Circuits, Power and Computing Technologies (ICCPCT), 2013 International Conference on
Conference_Location :
Nagercoil
Print_ISBN :
978-1-4673-4921-5
DOI :
10.1109/ICCPCT.2013.6528946
