Microcapacitive Differential Pressure Sensor diaphragm modeling using MATLAB

Author

Eswaran, Parthasarathy ; Malarvizhi, S.

Author_Institution

Department of Electronics and Communication Engineering, SRM University, Kattankulathur, Kancheepuram Dt.-603203, Tamil Nadu, India

fYear

2013

fDate

20-21 March 2013

Firstpage

725

Lastpage

729

Abstract

In this Paper, we propose the modeling of diaphragm membrane of Capacitive Differential Pressure Sensor (CDPS) for aircraft altimeter using MATLAB. Simple numerical integration technique is used to understand the complex deflection theory of Plates. Polymide material of Square diaphragm membrane with all edges clamped condition was considered in this analysis. Governing equation of clamped plate theory was explained. Deflection equation was simulated for the pressure range of 100mbar to 1100mbar. Center deflection characteristic was studied and the deflection at each node on the diaphragm membrane surface was measured. The Simulation results obtained using MATLAB shows close agreement with results of standard FEM tool and theoretical values.

Keywords

Educational institutions; MATLAB; Mathematical model; Capacitive Differential Pressure sensor(CDPS); Micro pressure sensor; Numerical solution for pressure sensor; center deflection modeling; diaphragm modeling;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits, Power and Computing Technologies (ICCPCT), 2013 International Conference on

Conference_Location

Nagercoil

Print_ISBN

978-1-4673-4921-5

Type

conf

DOI

10.1109/ICCPCT.2013.6529003

Filename

6529003