Title :
A wake-up switch using a piezoelectric differential pressure sensor
Author :
Tomimatsu, Y. ; Takahashi, Hiroki ; Kobayashi, Takehiko ; Matsumoto, Kaname ; Shimoyama, Isao ; Itoh, Takayuki ; Maeda, Ryutaro
Author_Institution :
NMEMS Technol. Res. Organ., Tsukuba, Japan
Abstract :
This paper reports a wake-up switch using a piezoelectric differential pressure sensor in order to reduce the power consumption of a wireless sensor node. Air pressure change surrounding the sensor is detected by using a Pb(Zr, Ti)O3(PZT) thin film cantilever with the dimension of 1500 μm × 1000 μm × 2 μm. The sensor has high sensitivity with low power consumption due to its thin cantilever and low capacitance. The sensitivity was 2.4 mV/Pa from -30 Pa to 30 Pa. It was demonstrated that the fabricated sensor performed as a wake-up switch when pressure varies in 10 Pa with low power consumption.
Keywords :
lead compounds; piezoelectric transducers; pressure sensors; thin film sensors; wireless sensor networks; zirconium compounds; PZT; air pressure; piezoelectric differential pressure sensor; power consumption; thin film cantilever; wake-up switch; wireless sensor node; Power demand; Pressure measurement; Resonant frequency; Sensitivity; Silicon; Switches; Wireless sensor networks;
Conference_Titel :
Intelligent Sensors, Sensor Networks and Information Processing, 2013 IEEE Eighth International Conference on
Conference_Location :
Melbourne, VIC
Print_ISBN :
978-1-4673-5499-8
DOI :
10.1109/ISSNIP.2013.6529757
