DocumentCode
606874
Title
A cost effective AFM setup, combining interferometry and FPGA
Author
Couturier, Raphail ; Domas, S. ; Goavec-Merou, Gwenhael ; Favre, M. ; Lenczner, M. ; Meister, A.
Author_Institution
DISC, Univ. of Franche-Comte, Belfort, France
fYear
2013
fDate
14-17 April 2013
Firstpage
1
Lastpage
6
Abstract
Atomic force microscopes (AFM) provide high resolution images of surfaces. In this paper, we focus on an interferometry method for estimation of deflections in arrays of cantilever in quasi-static regime. We propose a novel complete solution with a least square based algorithm to determine interference fringe phases and its optimized FPGA implementation. Simulations and real tests show very good results and open perspectives for real-time estimation and control of cantilever arrays in the dynamic regime.
Keywords
atomic force microscopy; field programmable gate arrays; light interferometry; AFM setup; FPGA; atomic force microscopes; cantilever array; interference fringe phase; interferometry method; quasistatic regime; Abstracts; Computational modeling; Equations; Interpolation; Mathematical model; Noise; Splines (mathematics);
fLanguage
English
Publisher
ieee
Conference_Titel
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2013 14th International Conference on
Conference_Location
Wroclaw
Print_ISBN
978-1-4673-6138-5
Type
conf
DOI
10.1109/EuroSimE.2013.6529935
Filename
6529935
Link To Document