Title :
Investigation into modelling power output for MEMS energy harvesting devices using COMSOL MultiphysicsR
Author :
O´Keeffe, R. ; Jackson, Nathan ; Waldron, F. ; O´Niell, M. ; McCarthy, K. ; Mathewson, A.
Author_Institution :
Tyndall Nat. Inst., Univ. Coll. Cork, Cork, Ireland
Abstract :
A COMSOL MultiphysicsR model was created which provides accurate information on the resonant frequency, stress and power output of an ALN piezoelectric device. The maximum error in the resonant frequency was found to be 4%. The models accurately predicted the trend of the output power for external impedances as well as the matched impedance for maximum energy harvesting. The expected voltage and current output for 1g acceleration was also be modeled.
Keywords :
electronic engineering computing; energy harvesting; finite element analysis; micromechanical devices; piezoelectric transducers; ALN piezoelectric device; COMSOL Multiphysics model; MEMS energy harvesting devices; external impedances; power output modelling; resonant frequency; Electrical resistance measurement; MATLAB; Mathematical model; Micromechanical devices; Resistance; Resonant frequency; Semiconductor device modeling; AlN; COMSOL; energy harvesting; piezoelectric;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2013 14th International Conference on
Conference_Location :
Wroclaw
Print_ISBN :
978-1-4673-6138-5
DOI :
10.1109/EuroSimE.2013.6529988
