Improved Performance of Integrated Solenoid Fluxgate Sensor Chip Using a Bilayer Co-Based Ribbon Core

Author

Chong Lei ; Yan Liu ; Xue-Cheng Sun ; Tao Wang ; Zhen Yang ; Yong Zhou

Author_Institution

Dept. of Micro/Nano Electron., Shanghai Jiao Tong Univ., Shanghai, China

Volume

15

Issue

9

fYear

2015

fDate

Sept. 2015

Firstpage

5010

Lastpage

5014

Abstract

In this paper, based on the multiwire core design and microelectromechanical system technology, we report improved performance of a microsolenoid fluxgate sensor by integrating a bilayer core of co-based amorphous ribbon. By means of utilizing integrated multilayer core structure and high permeability amorphous ribbon core material, this paper shows how a high-performance microfluxgate chip with small dimensions can be realized. The fabricated sensors exhibit a best sensitivity of 3165 V/T, a power of 183.2 mW and a linear range of 150 μT at 100 kHz. The noise power density is found to be 0.5 nT/Hz^1/2 1 Hz and the noise rms level is 2 nT in the frequency range of 25 mHz-10 Hz.

Keywords

amorphous magnetic materials; fluxgate magnetometers; magnetic cores; magnetic multilayers; magnetic permeability; microfabrication; microsensors; solenoids; bilayer cobased amorphous ribbon core; frequency 100 kHz; frequency 25 mHz to 10 Hz; integrated solenoid microfluxgate sensor chip; magnetic flux density 150 muT; magnetic flux density 2 nT; microelectromechanical system technology; microfabrication; microsolenoid fluxgate sensor; multiwire core design; permeability; power 183.2 mW; Magnetic cores; Magnetic sensors; Magnetometers; Micromechanical devices; Noise; Sensitivity; Fluxgate sensor; MEMS; amorphous ribbon; bi-layer core; fluxgate sensor;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2015.2432457

Filename

7105846