Wafer-level MEMS package and its reliability issues

Author

Tanaka, Shoji ; Esashi, Masayoshi

Author_Institution

Tohoku Univ., Sendai, Japan

fYear

2013

fDate

14-18 April 2013

Abstract

This paper reviews wafer-level hermetic packaging technology using anodic bonding from several reliability points of view. First, reliability risk factors of high temperature, high voltage and electrochemical O₂ generation during anodic bonding are discussed. Next, electrical interconnections through a hermetic package, i.e. electrical feedthrough, is discussed. The reliability of both hermetic sealing and electrical feedthrough must be simultaneously satisfied. A new wafer-level MEMS packaging material, anodically-bondable low temperature cofired ceramic (LTCC) wafer, is introduced, and its reliability data on hermetic sealing, electrical interconnection and flip-chip mounting on a printed circuit board (PCB) are described.

Keywords

anodisation; ceramic packaging; electrochemical analysis; flip-chip devices; hermetic seals; integrated circuit interconnections; integrated circuit reliability; micromechanical devices; printed circuit interconnections; wafer bonding; wafer level packaging; LTCC; PCB; anodically-bondable low temperature cofired ceramic wafer; electrical feedthrough; electrical interconnection; electrochemical generation; flip-chip mounting; hermetic sealing; printed circuit board; reliability risk factor; wafer-level MEMS packaging material; wafer-level hermetic packaging technology; Bonding; Cavity resonators; Glass; Micromechanical devices; Packaging; Semiconductor device reliability; Anodic bonding; Electrical feedthrough; Low temperature cofired ceramics (LTCC); Micro electro mechanical systems (MEMS); Wafer-level packaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium (IRPS), 2013 IEEE International

Conference_Location

Anaheim, CA

ISSN

1541-7026

Print_ISBN

978-1-4799-0112-8

Electronic_ISBN

1541-7026

Type

conf

DOI

10.1109/IRPS.2013.6532047

Filename

6532047