DocumentCode :
608252
Title :
Resistor-less power-rail ESD clamp circuit with ultra-low leakage current in 65nm CMOS process
Author :
Chih-Ting Yeh ; Ming-Dou Ker
Author_Institution :
Inf. & Commun. Res. Labs., Ind. Technol. Res. Inst., Hsinchu, Taiwan
fYear :
2013
fDate :
14-18 April 2013
Abstract :
A resistor-less power-rail ESD clamp circuit realized with only thin gate oxide devices, and with SCR as main ESD clamp device, has been proposed and verified in a 65nm 1V CMOS process. Skillfully utilizing the gate leakage currents to realize the equivalent resistors in the ESD-transient detection circuit, the RC-based ESD-transient detection mechanism can be achieved without using an actual resistor to reduce the layout area in I/O cells. From the measured results, the proposed power-rail ESD clamp circuit with SCR width of 45μm can achieve 5kV HBM and 400V MM ESD levels under the ESD stress event, while consuming only a standby leakage current of 1.43nA at 25°C under the normal circuit operating condition with 1V bias.
Keywords :
CMOS integrated circuits; RC circuits; clamps; detector circuits; electrostatic discharge; integrated circuit layout; integrated circuit measurement; leakage currents; low-power electronics; power integrated circuits; stress analysis; thyristors; CMOS process; ESD stress event; HBM level; I-O cell; MM ESD level; RC-based ESD-transient detection mechanism; SCR; current 1.43 nA; layout area reduction; resistor-less power-rail ESD clamp circuit; size 45 mum; size 65 nm; temperature 25 degC; thin gate oxide device; ultralow gate leakage current; voltage 1 V; voltage 400 V; voltage 5 kV; Clamps; Current measurement; Electrostatic discharges; Leakage currents; Logic gates; Thyristors; Transient analysis; Electrostatic discharge (ESD); gate leakage; power-rail ESD clamp circuit; silicon-controlled rectifier (SCR);
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium (IRPS), 2013 IEEE International
Conference_Location :
Anaheim, CA
ISSN :
1541-7026
Print_ISBN :
978-1-4799-0112-8
Electronic_ISBN :
1541-7026
Type :
conf
DOI :
10.1109/IRPS.2013.6532071
Filename :
6532071
Link To Document :
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