Title :
Ultracompact Si electro-optic modulator based on horizontal Cu-insulator-Si-insulator-Cu nanoplasmonic waveguide
Author :
Shiyang Zhu ; Lo, G.Q. ; Kwong, D.L.
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
We experimentally demonstrate ultracompact Si electro-optic modulators based on horizontal Cu-insulator-Si-insulator-Cu nanoplasmonic waveguides on SOI substrates using standard CMOS technology. A modulator with 1-μm-long phase shifter exhibits 9-dB extinction ratio under 6-V/10-kHz voltage swing.
Keywords :
electro-optical devices; optical modulation; phase shifters; plasmonics; silicon-on-insulator; SOI substrates; horizontal nanoplasmonic waveguide; phase shifter; standard CMOS technology; ultracompact silicon electrooptic modulators; voltage swing; Indexes; Modulation; Optical waveguides; Plasmons; Propagation losses; Silicon; Voltage measurement;
Conference_Titel :
Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC), 2013
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4799-0457-0
