Title :
Micro-ring optical resonators fabricated by selective oxidation of refractory metals (SORM)
Author :
Rabiei, Payam ; Jichi Ma ; Khan, Sharifullah ; Chiles, Jeff ; Fathpour, Sasan
Author_Institution :
CREOL, Univ. of Central Florida, Orlando, FL, USA
Abstract :
A novel platform for integrated photonic circuits is proposed based on selective oxidation of refractory metals (SORM). Low-loss tantalum pentoxide coupled micro-ring optical resonators and high-index contrast ridge waveguides are demonstrated based on this platform.
Keywords :
integrated optics; micro-optics; microfabrication; optical fabrication; optical resonators; optical waveguides; oxidation; refractories; ridge waveguides; tantalum compounds; SORM; TaO5; high-index contrast ridge waveguides; integrated photonic circuits; low-loss tantalum pentoxide; microring optical resonators; refractory metals; selective oxidation; Couplings; Materials; Optical device fabrication; Optical waveguides; Oxidation; Propagation losses;
Conference_Titel :
Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC), 2013
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4799-0457-0
