• DocumentCode
    608902
  • Title

    Micro-ring optical resonators fabricated by selective oxidation of refractory metals (SORM)

  • Author

    Rabiei, Payam ; Jichi Ma ; Khan, Sharifullah ; Chiles, Jeff ; Fathpour, Sasan

  • Author_Institution
    CREOL, Univ. of Central Florida, Orlando, FL, USA
  • fYear
    2013
  • fDate
    17-21 March 2013
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    A novel platform for integrated photonic circuits is proposed based on selective oxidation of refractory metals (SORM). Low-loss tantalum pentoxide coupled micro-ring optical resonators and high-index contrast ridge waveguides are demonstrated based on this platform.
  • Keywords
    integrated optics; micro-optics; microfabrication; optical fabrication; optical resonators; optical waveguides; oxidation; refractories; ridge waveguides; tantalum compounds; SORM; TaO5; high-index contrast ridge waveguides; integrated photonic circuits; low-loss tantalum pentoxide; microring optical resonators; refractory metals; selective oxidation; Couplings; Materials; Optical device fabrication; Optical waveguides; Oxidation; Propagation losses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC), 2013
  • Conference_Location
    Anaheim, CA
  • Print_ISBN
    978-1-4799-0457-0
  • Type

    conf

  • Filename
    6533042
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=608902