• DocumentCode
    609504
  • Title

    A 2D transducer structure for the excitation of surface acoustic wave

  • Author

    Daniau, W. ; Baron, T. ; Garcia, J. ; Laroche, T. ; Ballandras, S.

  • Author_Institution
    FEMTO-ST, UFC-ENSMM-UTBM, Besancon, France
  • fYear
    2010
  • fDate
    13-16 April 2010
  • Firstpage
    1
  • Lastpage
    6
  • Abstract
    In this work, we propose a new 2D bi-periodic transducer fabricated on single crystal susbtrates allowing for complex wave polarization excitation. The structure has been theoretically analysed using a mixed finite element/boundary element approach, showing numerous acoustic-electric contribution on the harmonic admittance for quartz. An experimental device then has been built on LiNbO3 using SiO2 spacers for 2D interconnection purpose. The device has been tested successfully, allowing for a first demonstration of the transduction principle. More work now will be achieve to better understand the transducer operation and to propose actual application of this 2D transducer.
  • Keywords
    boundary-elements methods; finite element analysis; quartz; surface acoustic wave transducers; 2D interconnection; 2D transducer structure; LiNbO3; SiO2; acoustic-electric contribution; complex wave polarization excitation; harmonic admittance; mixed finite element/boundary element; quartz; single crystal; surface acoustic wave;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    EFTF-2010 24th European Frequency and Time Forum
  • Conference_Location
    Noordwijk
  • Print_ISBN
    978-1-4673-5970-2
  • Type

    conf

  • DOI
    10.1109/EFTF.2010.6533656
  • Filename
    6533656