• DocumentCode
    610100
  • Title

    Lossless Compression of Rotated Maskless Lithography Images

  • Author

    Klein, S.T. ; Shapira, D. ; Shelef, G.

  • Author_Institution
    CS Dept., Bar Ilan Univ., Ramat-Gan, Israel
  • fYear
    2013
  • fDate
    20-22 March 2013
  • Firstpage
    500
  • Lastpage
    500
  • Abstract
    A new lossless image compression algorithm is presented, aimed at mask less lithography systems with mostly right-angled regular structures. Since these images appear often in slightly rotated form, an algorithm dealing with this special case is suggested, which improves performance relative to the state of the art alternatives.
  • Keywords
    data compression; image coding; lithography; lossless image compression algorithm; right-angled regular structures; rotated maskless lithography images; Educational institutions; Image coding; Image restoration; Lithography; Streaming media; Vectors; lossless image compression; maskless lithography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Data Compression Conference (DCC), 2013
  • Conference_Location
    Snowbird, UT
  • ISSN
    1068-0314
  • Print_ISBN
    978-1-4673-6037-1
  • Type

    conf

  • DOI
    10.1109/DCC.2013.80
  • Filename
    6543110