Title :
Lossless Compression of Rotated Maskless Lithography Images
Author :
Klein, S.T. ; Shapira, D. ; Shelef, G.
Author_Institution :
CS Dept., Bar Ilan Univ., Ramat-Gan, Israel
Abstract :
A new lossless image compression algorithm is presented, aimed at mask less lithography systems with mostly right-angled regular structures. Since these images appear often in slightly rotated form, an algorithm dealing with this special case is suggested, which improves performance relative to the state of the art alternatives.
Keywords :
data compression; image coding; lithography; lossless image compression algorithm; right-angled regular structures; rotated maskless lithography images; Educational institutions; Image coding; Image restoration; Lithography; Streaming media; Vectors; lossless image compression; maskless lithography;
Conference_Titel :
Data Compression Conference (DCC), 2013
Conference_Location :
Snowbird, UT
Print_ISBN :
978-1-4673-6037-1
DOI :
10.1109/DCC.2013.80
