Title :
Development of MEMS resistive parameters automatic control specialized computer system
Author :
Pukach, A. ; Teslyuk, Vasyl ; Ivantsiv, R. ; Denysyuk, Pavlo
Author_Institution :
CAD Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
This paper is developed to specialized computer system, which serves as an effective tool for solving urgent problem of microelectromechanical systems resistive parameters automatic control.
Keywords :
computerised control; micromechanical devices; resistors; MEMS resistive parameters automatic control specialized computer system; microelectromechanical systems resistive parameters automatic control; Computers; Decision making; Design automation; Educational institutions; Microelectromechanical systems; Micromechanical devices; Synchronization; MEMS; SKS; control; resistor; system;
Conference_Titel :
Experience of Designing and Application of CAD Systems in Microelectronics (CADSM), 2013 12th International Conference on the
Conference_Location :
Polyana Svalyava
Print_ISBN :
978-1-4673-6461-4
