DocumentCode
610213
Title
Development of MEMS resistive parameters automatic control specialized computer system
Author
Pukach, A. ; Teslyuk, Vasyl ; Ivantsiv, R. ; Denysyuk, Pavlo
Author_Institution
CAD Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
fYear
2013
fDate
19-23 Feb. 2013
Firstpage
438
Lastpage
438
Abstract
This paper is developed to specialized computer system, which serves as an effective tool for solving urgent problem of microelectromechanical systems resistive parameters automatic control.
Keywords
computerised control; micromechanical devices; resistors; MEMS resistive parameters automatic control specialized computer system; microelectromechanical systems resistive parameters automatic control; Computers; Decision making; Design automation; Educational institutions; Microelectromechanical systems; Micromechanical devices; Synchronization; MEMS; SKS; control; resistor; system;
fLanguage
English
Publisher
ieee
Conference_Titel
Experience of Designing and Application of CAD Systems in Microelectronics (CADSM), 2013 12th International Conference on the
Conference_Location
Polyana Svalyava
Print_ISBN
978-1-4673-6461-4
Type
conf
Filename
6543322
Link To Document