Title :
Challenges in nanoscale patterning- Interfering with interference and possible applications in semiconductor and energy sectors
Author_Institution :
Center for Opt. & Laser Eng., Nanyang Technol. Univ., Singapore, Singapore
Abstract :
This invited paper covers the challenges in nanoscale patterning by giving an overview of the different optical concepts and approaches developed by the authors group focusing on conventional and near filed optics interference.
Keywords :
light interference; nanopatterning; nanophotonics; reviews; energy sector; nanoscale interfering; nanoscale patterning; near filed optics interference; optical concepts; semiconductor sector;
Conference_Titel :
Fiber Optics and Photonics (PHOTONICS), 2012 International Conference on
Conference_Location :
Chennai
Print_ISBN :
978-1-4673-4718-1
