DocumentCode
610521
Title
Challenges in nanoscale patterning- Interfering with interference and possible applications in semiconductor and energy sectors
Author
Matham, M.V.
Author_Institution
Center for Opt. & Laser Eng., Nanyang Technol. Univ., Singapore, Singapore
fYear
2012
fDate
9-12 Dec. 2012
Firstpage
1
Lastpage
3
Abstract
This invited paper covers the challenges in nanoscale patterning by giving an overview of the different optical concepts and approaches developed by the authors group focusing on conventional and near filed optics interference.
Keywords
light interference; nanopatterning; nanophotonics; reviews; energy sector; nanoscale interfering; nanoscale patterning; near filed optics interference; optical concepts; semiconductor sector;
fLanguage
English
Publisher
ieee
Conference_Titel
Fiber Optics and Photonics (PHOTONICS), 2012 International Conference on
Conference_Location
Chennai
Print_ISBN
978-1-4673-4718-1
Type
conf
Filename
6545480
Link To Document