Title :
Fiber-Optic Fabry–Pérot Acoustic Sensor With Multilayer Graphene Diaphragm
Author :
Jun Ma ; Haifeng Xuan ; Hoi Lut Ho ; Wei Jin ; Yuanhong Yang ; Shangchun Fan
Author_Institution :
Dept. of Electr. Eng., Hong Kong Polytech. Univ., Hong Kong, China
Abstract :
A fiber-optic Fabry-Pérot acoustic sensor with a ~100-nm-thick multilayer graphene diaphragm is reported. Acoustic testing demonstrates a pressure-induced deflection of 1100 nm/kPa and a noise equivalent acoustic signal level of ~ 60 μPa/Hz1/2 at the frequency of 10 kHz. The sensor exhibits a flat frequency response from 0.2 to 22 kHz and may be useful for highly sensitive acoustic sensing.
Keywords :
acoustic transducers; fibre optic sensors; graphene; optical multilayers; acoustic sensing; fiber-optic Fabry-Pérot acoustic sensor; frequency 0.2 kHz to 22 kHz; frequency 10 kHz; multilayer graphene diaphragm; pressure-induced deflection; size 100 nm; Acoustic sensing; Fabry–Pérot; multilayer graphene; optical fiber sensor;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2013.2256343