Title :
Controllable growth of copper fractal aggregates on structurally modified silicon surface
Author :
Boyko, Anton ; Timoshenkov, S. ; Litmanovich, Dmitry ; Gaev, Dahir
Author_Institution :
Dept. of Microelectron., Nat. Res. Univ. of Electron. Technol., Moscow, Russia
Abstract :
Copper layers of highly developed surface have been formed by electrodeposition technique on structurally modified silicon substrate. Silicon patterns were obtained by electrochemical anodizing as well as by wet etching and acted the part of solidification centers at the growth process. The effect of the current density on the morphology of copper fractal aggregates has been investigated. It was found that a change of current density has a significant impact on texture and fractal dimension of the aggregates. Increasing of the current density from 0.25 to 1.5 mA/cm2 changes form of the fractals from spherical to symmetrically branched (dendritic) and fractal dimension from 2.55 up to 2.8 respectively. All the samples are of uniform quasi-periodical distribution of the aggregates over the surface that is substantially conditioned by properties of the modified surface.
Keywords :
aggregates (materials); anodisation; copper; current density; electrochemistry; electrodeposition; etching; fractals; surface morphology; surface texture; Cu; Si; copper fractal aggregates; current density; electrochemical anodizing; electrodeposition; morphology; solidification centers; structurally modified silicon substrate surface; texture; wet etching; Aggregates; Copper; Current density; Fractals; Silicon; Surface morphology; Surface treatment; advanced materials; fractals; nanostructuring; porous silicon;
Conference_Titel :
Electronics and Nanotechnology (ELNANO), 2013 IEEE XXXIII International Scientific Conference
Conference_Location :
Kiev
Print_ISBN :
978-1-4673-4669-6
DOI :
10.1109/ELNANO.2013.6551999