Title :
Synthesis of ZnO nanorods for acoustic wave sensor
Author :
Orlov, Alexei ; Ulianova, Veronika ; Yakimenko, Y. ; Bogdan, Oleksandr ; Pashkevich, Gennady
Author_Institution :
Dept. of Microelectron., Nat. Tech. Univ. of Ukraine “KPI”, Kiev, Ukraine
Abstract :
We reported the electrochemical growth of zinc oxide nanorods in a zinc nitrate/hexamethylenetetramine solution at 60°C. High-density vertical nanorods were grown on Au-coated lithium niobate substrates and aluminum foil. Scanning electron microscopy results showed that hexagon-shaped ZnO nanorods with a diameter in the range of 150 nm to 300 nm and a length of about 3 μm were formed. Application of synthesized ZnO nanorods as sensing element of SAW devices will promote quality and accuracy enhancement, manufacturing simplification, and novel acoustic wave sensors simulation technique improvements due to the mathematical representation simplicity of the regular-shaped structures.
Keywords :
II-VI semiconductors; electrochemistry; nanofabrication; nanorods; scanning electron microscopy; semiconductor growth; wide band gap semiconductors; zinc compounds; Au-Al; Au-LiNbO3; Au-coated aluminum foil; Au-coated lithium niobate substrates; SAW devices; ZnO; acoustic wave sensors; electrochemical growth; hexagon-shaped zinc oxide nanorods; high-density vertical nanorods; mathematical representation simplicity; regular-shaped structures; scanning electron microscopy; sensing element; temperature 60 degC; zinc nitrate-hexamethylenetetramine solution; Acoustic waves; Aluminum; Lithium niobate; Scanning electron microscopy; Substrates; Zinc oxide; SAW sensor; ZnO nanorods; electrochemical growth;
Conference_Titel :
Electronics and Nanotechnology (ELNANO), 2013 IEEE XXXIII International Scientific Conference
Conference_Location :
Kiev
Print_ISBN :
978-1-4673-4669-6
DOI :
10.1109/ELNANO.2013.6552008
