• DocumentCode
    614430
  • Title

    Synthesis of ZnO nanorods for acoustic wave sensor

  • Author

    Orlov, Alexei ; Ulianova, Veronika ; Yakimenko, Y. ; Bogdan, Oleksandr ; Pashkevich, Gennady

  • Author_Institution
    Dept. of Microelectron., Nat. Tech. Univ. of Ukraine “KPI”, Kiev, Ukraine
  • fYear
    2013
  • fDate
    16-19 April 2013
  • Firstpage
    25
  • Lastpage
    27
  • Abstract
    We reported the electrochemical growth of zinc oxide nanorods in a zinc nitrate/hexamethylenetetramine solution at 60°C. High-density vertical nanorods were grown on Au-coated lithium niobate substrates and aluminum foil. Scanning electron microscopy results showed that hexagon-shaped ZnO nanorods with a diameter in the range of 150 nm to 300 nm and a length of about 3 μm were formed. Application of synthesized ZnO nanorods as sensing element of SAW devices will promote quality and accuracy enhancement, manufacturing simplification, and novel acoustic wave sensors simulation technique improvements due to the mathematical representation simplicity of the regular-shaped structures.
  • Keywords
    II-VI semiconductors; electrochemistry; nanofabrication; nanorods; scanning electron microscopy; semiconductor growth; wide band gap semiconductors; zinc compounds; Au-Al; Au-LiNbO3; Au-coated aluminum foil; Au-coated lithium niobate substrates; SAW devices; ZnO; acoustic wave sensors; electrochemical growth; hexagon-shaped zinc oxide nanorods; high-density vertical nanorods; mathematical representation simplicity; regular-shaped structures; scanning electron microscopy; sensing element; temperature 60 degC; zinc nitrate-hexamethylenetetramine solution; Acoustic waves; Aluminum; Lithium niobate; Scanning electron microscopy; Substrates; Zinc oxide; SAW sensor; ZnO nanorods; electrochemical growth;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics and Nanotechnology (ELNANO), 2013 IEEE XXXIII International Scientific Conference
  • Conference_Location
    Kiev
  • Print_ISBN
    978-1-4673-4669-6
  • Type

    conf

  • DOI
    10.1109/ELNANO.2013.6552008
  • Filename
    6552008