Title :
Improvement of piezoceramic scanners
Author :
Sharapov, V.M. ; Filimonov, S.A. ; Sotula, Zh.V. ; Bazilo, K.V. ; Kunitskaya, L.G. ; Zaika, V.M.
Author_Institution :
Cherkasy State Technol. Univ., Cherkasy, Ukraine
Abstract :
The article is devoted to the problems of piezoscanners. The analysis of existent domestic and foreign constructions of piezoscanners is conducted. The design of the piezoceramic scanner on the basis of flat bimorph piezoelements of a trapezial form for scanning probe microscopes is offered and investigated. Built and probed model of this scanners through the package of the program Femlab 3.5.
Keywords :
piezoceramics; scanning probe microscopy; flat bimorph piezoelements; piezoceramic scanner improvement; program Femlab 3.5; scanning probe microscopes; trapezial form; Fluctuations; Materials; Metals; Probes; Resistance; Scanning probe microscopy; Sensitivity; nanotechnology; piezoceramic scanner; scanning probe microscopy;
Conference_Titel :
Electronics and Nanotechnology (ELNANO), 2013 IEEE XXXIII International Scientific Conference
Conference_Location :
Kiev
Print_ISBN :
978-1-4673-4669-6
DOI :
10.1109/ELNANO.2013.6552063
