• DocumentCode
    614902
  • Title

    Organizing committee

  • fYear
    2013
  • fDate
    14-16 May 2013
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    Provides a listing of current committee members and society officers.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference (ASMC), 2013 24th Annual SEMI
  • Conference_Location
    Saratoga Springs, NY, USA
  • ISSN
    1078-8743
  • Print_ISBN
    978-1-4673-5006-8
  • Type

    conf

  • DOI
    10.1109/ASMC.2013.6552739
  • Filename
    6552739