DocumentCode
614909
Title
Feasible industrial fabrication of thin film transistor based on randomized network of single walled carbon nanotubes
Author
Mousavi, Amin ; Lamberti, P. ; Tucci, V. ; Wagner, V.
Author_Institution
Dept. of Comput. & Electr. Eng. & Appl. Math., Univ. of Salerno, Fisciano, Italy
fYear
2013
fDate
14-16 May 2013
Firstpage
18
Lastpage
23
Abstract
In this paper, the fabrication of thin film transistor based on randomized network of single walled carbon nano tubes (SWCNTs-TFT) is presented. The randomized network is obtained by deposition of dispersed SWCNTs on the substrate with a novel technique combining vacuum filtration and silanization of substrate. This approach, which is compatible with all kind of substrates, allows a fabrication process at room temperature that is capable to overcome the high temperature procedure for CNTs deposition. The drain and source electrodes of the TFT are based on an interdigitated electrode (IDE) with 8 μm channel length and 3mm channel width. The obtained device shows output performance with an apparent mobility of 40.7 cm2/Vs, current density 0.05 μA/μm and ION /IOFF ratio 2×103. A comparison of the model describing the SWCNTs-TFT with that of (metal-oxide-semiconductor) MOS-like device confirms a p-type behavior. The proposed approach can be easily transformed to large areas leading to a suitable use in low cost industrial application.
Keywords
carbon nanotubes; electrodes; filtration; semiconductor industry; thin film transistors; IDE; SWCNT; TFT; industrial fabrication; interdigitated electrode; randomized network; silanization; single walled carbon nanotubes; thin film transistor; vacuum filtration; Carbon nanotubes; Electrodes; Logic gates; Substrates; Thin film transistors; Carbon nanotube; field effect transitor; randomized network; thin film; vacuum filtration deposition;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference (ASMC), 2013 24th Annual SEMI
Conference_Location
Saratoga Springs, NY
ISSN
1078-8743
Print_ISBN
978-1-4673-5006-8
Type
conf
DOI
10.1109/ASMC.2013.6552746
Filename
6552746
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