• DocumentCode
    614909
  • Title

    Feasible industrial fabrication of thin film transistor based on randomized network of single walled carbon nanotubes

  • Author

    Mousavi, Amin ; Lamberti, P. ; Tucci, V. ; Wagner, V.

  • Author_Institution
    Dept. of Comput. & Electr. Eng. & Appl. Math., Univ. of Salerno, Fisciano, Italy
  • fYear
    2013
  • fDate
    14-16 May 2013
  • Firstpage
    18
  • Lastpage
    23
  • Abstract
    In this paper, the fabrication of thin film transistor based on randomized network of single walled carbon nano tubes (SWCNTs-TFT) is presented. The randomized network is obtained by deposition of dispersed SWCNTs on the substrate with a novel technique combining vacuum filtration and silanization of substrate. This approach, which is compatible with all kind of substrates, allows a fabrication process at room temperature that is capable to overcome the high temperature procedure for CNTs deposition. The drain and source electrodes of the TFT are based on an interdigitated electrode (IDE) with 8 μm channel length and 3mm channel width. The obtained device shows output performance with an apparent mobility of 40.7 cm2/Vs, current density 0.05 μA/μm and ION /IOFF ratio 2×103. A comparison of the model describing the SWCNTs-TFT with that of (metal-oxide-semiconductor) MOS-like device confirms a p-type behavior. The proposed approach can be easily transformed to large areas leading to a suitable use in low cost industrial application.
  • Keywords
    carbon nanotubes; electrodes; filtration; semiconductor industry; thin film transistors; IDE; SWCNT; TFT; industrial fabrication; interdigitated electrode; randomized network; silanization; single walled carbon nanotubes; thin film transistor; vacuum filtration; Carbon nanotubes; Electrodes; Logic gates; Substrates; Thin film transistors; Carbon nanotube; field effect transitor; randomized network; thin film; vacuum filtration deposition;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference (ASMC), 2013 24th Annual SEMI
  • Conference_Location
    Saratoga Springs, NY
  • ISSN
    1078-8743
  • Print_ISBN
    978-1-4673-5006-8
  • Type

    conf

  • DOI
    10.1109/ASMC.2013.6552746
  • Filename
    6552746