Title :
The analysis of process queue time in a foundry environment
Author :
Retersdorf, Michael ; Lederer, Ulf
Author_Institution :
Manuf. Technol. - Yield Solutions Group, GLOBALFOUNDRIES, Malta, NY, USA
Abstract :
This paper focuses on the mechanics and statistical techniques that are utilized to measure the impact of Qtime on a yield or parametric measurement on the wafers for a single specific process. It covers the techniques that have been utilized by GLOBALFOUNDRIES to identify all of the processes that may contribute to negative effects of product quality due to the effects of Qtime. These methodologies do not contain any complex mathematical techniques but the simple and intuitive approach to this analysis approach has been demonstrated to be very effective.
Keywords :
foundries; product quality; queueing theory; semiconductor technology; statistical analysis; GLOBALFOUNDRIES; Qtime impact; complex mathematical technique; foundry environment; parametric measurement; process queue time analysis; product quality; single-specific process; statistical technique; Data mining; Data visualization; Foundries; Manufacturing; Queueing analysis; Sensitivity; data mining; etest; queue time; yield analysis;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2013 24th Annual SEMI
Conference_Location :
Saratoga Springs, NY
Print_ISBN :
978-1-4673-5006-8
DOI :
10.1109/ASMC.2013.6552785
