Design-enabled manufacturing enablement using manufacturing design request tracker (MDRT)

Author

Sultan, Ahmed ; Desineni, Rao ; Hassmann, Jens ; Hoeppner, Kristina ; Ramanathan, Eswar ; Babcock, Carl ; Kok Peng Chua ; Teoh, Edward ; Dai, Vito ; Yeo, Sky ; Hui, Colin ; Capodieci, Luigi ; McGowan, Sarah ; Madge, Robert

Author_Institution

GLOBALFOUNDRIES, Malta, NY, USA

fYear

2013

fDate

14-16 May 2013

Firstpage

126

Lastpage

129

Abstract

The shrinking dimensions with advanced technologies pose yield challenges which require continuous enhancement of yield methodologies to quickly detect and fix the marginal layout features. In this paper, we present a practical approach to enhance the DFM and DEM capabilities suite provided by GLOBALFOUNDRIES for 28nm technology and beyond. The MDRT system has been implemented in the Product Lifecycle Management (PLM) system within GLOBALFOUNDRIES.

Keywords

design for manufacture; integrated circuit layout; product life cycle management; semiconductor device manufacture; DEM capability; DFM capability; GLOBALFOUNDRIES; MDRT; PLM; design enabled manufacturing; design for manufacturing; design-enabled manufacturing enablement; manufacturing design request tracker; marginal layout features; product lifecycle management; shrinking dimensions; size 28 nm; Databases; Inspection; Layout; Libraries; Manufacturing; Metrology; Systematics; OPC; bridging; systematic layout defects; yield learning;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference (ASMC), 2013 24th Annual SEMI

Conference_Location

Saratoga Springs, NY

ISSN

1078-8743

Print_ISBN

978-1-4673-5006-8

Type

conf

DOI

10.1109/ASMC.2013.6552799

Filename

6552799