Title :
Efficiency in sealing: A BKM case study
Author :
Vernikovsky, Dalia ; Ecker, Brad ; Urbach, Seth
Author_Institution :
Appl. Seals North America Inc., Newark, CA, USA
Abstract :
This case study describes Microchip´s experience with perfluoroelastomers o-ring seals.
Keywords :
elastomers; rings (structures); seals (stoppers); BKM case study; best-known method; perfluoroelastomers o-ring seal; sealing efficiency; Chemicals; Industries; Materials; North America; Seals; Standards; Structural rings;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2013 24th Annual SEMI
Conference_Location :
Saratoga Springs, NY
Print_ISBN :
978-1-4673-5006-8
DOI :
10.1109/ASMC.2013.6552801
