Title :
Integrated microring tuning in deep-trench bulk CMOS
Author :
Chen Sun ; Timurdogan, Erman ; Watts, Michael R. ; Stojanovic, V.
Author_Institution :
Res. Lab. of Electron., Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
An all-digital ΔΣ-based heater driver and a 6-μm diameter microring resonator are monolithically-integrated in deep-trench bulk CMOS. With clock scaling and 2.5V supply voltage, the system demonstrates a 350GHz tuning range and 10-15μW/GHz tuning efficiencies.
Keywords :
CMOS integrated circuits; circuit tuning; driver circuits; integrated optoelectronics; micro-optomechanical devices; micromechanical resonators; all-digital ΔΣ-based heater driver; clock scaling; deep-trench bulk CMOS; integrated microring tuning; microring resonator; size 6 mum; tuning efficiency; voltage 2.5 V; CMOS integrated circuits; Clocks; Optical filters; Resistance heating; Tuning;
Conference_Titel :
Optical Interconnects Conference, 2013 IEEE
Conference_Location :
Santa Fe, NM
Print_ISBN :
978-1-4673-5061-7
Electronic_ISBN :
978-1-4673-5062-4
DOI :
10.1109/OIC.2013.6552920
