• DocumentCode
    615017
  • Title

    Athermal silicon ring modulators clad with titanium dioxide by RF magnetron sputtering

  • Author

    Djordjevic, Stevan S. ; Kuanping Shang ; Binbin Guan ; Cheung, Stanley T. S. ; Chuan Qin ; Ling Liao ; Basak, Juthika ; Hai-Feng Liu ; Yoo, S.J.B.

  • Author_Institution
    Dept. of Electr. Eng., Univ. of California, Davis, Davis, CA, USA
  • fYear
    2013
  • fDate
    5-8 May 2013
  • Firstpage
    56
  • Lastpage
    57
  • Abstract
    We present design, fabrication and measurement of athermal silicon ring modulators fabricated on a SOI platform, overclad with 830nm thick amorphous titanium dioxide. Current injection achieves 35 dB extinction intensity modulation.
  • Keywords
    cladding techniques; electro-optical modulation; integrated optics; intensity modulation; optical design techniques; optical fabrication; silicon; silicon-on-insulator; titanium compounds; SOI; TiO2; current injection; extinction intensity modulation; optical design; optical fabrication; silicon-on-insulator; Arrayed waveguide gratings; Modulation; Optical ring resonators; Resonant frequency; Silicon; Titanium; Athermal; Modulator; Ring; Titanium-dioxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Interconnects Conference, 2013 IEEE
  • Conference_Location
    Santa Fe, NM
  • Print_ISBN
    978-1-4673-5061-7
  • Electronic_ISBN
    978-1-4673-5062-4
  • Type

    conf

  • DOI
    10.1109/OIC.2013.6552921
  • Filename
    6552921
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=615017