Title :
Athermal silicon ring modulators clad with titanium dioxide by RF magnetron sputtering
Author :
Djordjevic, Stevan S. ; Kuanping Shang ; Binbin Guan ; Cheung, Stanley T. S. ; Chuan Qin ; Ling Liao ; Basak, Juthika ; Hai-Feng Liu ; Yoo, S.J.B.
Author_Institution :
Dept. of Electr. Eng., Univ. of California, Davis, Davis, CA, USA
Abstract :
We present design, fabrication and measurement of athermal silicon ring modulators fabricated on a SOI platform, overclad with 830nm thick amorphous titanium dioxide. Current injection achieves 35 dB extinction intensity modulation.
Keywords :
cladding techniques; electro-optical modulation; integrated optics; intensity modulation; optical design techniques; optical fabrication; silicon; silicon-on-insulator; titanium compounds; SOI; TiO2; current injection; extinction intensity modulation; optical design; optical fabrication; silicon-on-insulator; Arrayed waveguide gratings; Modulation; Optical ring resonators; Resonant frequency; Silicon; Titanium; Athermal; Modulator; Ring; Titanium-dioxide;
Conference_Titel :
Optical Interconnects Conference, 2013 IEEE
Conference_Location :
Santa Fe, NM
Print_ISBN :
978-1-4673-5061-7
Electronic_ISBN :
978-1-4673-5062-4
DOI :
10.1109/OIC.2013.6552921
