Title :
MEMS 3-axis inertial sensor process
Author :
Dempwolf, Sophia ; Knechtel, Roy
Author_Institution :
MEMS Process Dev., X-FAB Semicond. Foundries AG, Erfurt, Germany
Abstract :
This paper introduces a modified MEMS foundry process allowing the production of 3D inertial sensors. The new MEMS process is suitable for a wide range of applications that use 3D accelerometers or gyroscopes. One-axis and three-axis designs can be produced with the same process, and the fabrication of complex inertial measurement units, particularly the assembly process, is simplified.
Keywords :
accelerometers; foundries; gyroscopes; microfabrication; microsensors; 3D accelerometers; 3D inertial sensors; MEMS 3-axis inertial sensor process; assembly process; complex inertial measurement units; gyroscopes; modified MEMS foundry process; one-axis design; three-axis design; Cavity resonators; Foundries; Metals; Micromechanical devices; Phase change materials; Pressure measurement; Silicon;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on
Conference_Location :
Barcelona
Print_ISBN :
978-1-4673-4477-7
