Title :
Pyroelectric PZT sensors screen printed on glass
Author :
Charlot, Benoit ; Coudouel, D. ; Combette, P. ; Giani, Annarita
Author_Institution :
Inst. d´Electonique du Sud, Univ. Montpellier 2, Montpellier, France
Abstract :
We present a pyroelectric device made from PZT screen printed on glass substrate. The pyroelectric thick film element is made of a stack of 50 μm PZT between silver electrodes. The device is placed under thermal load by a stream made of a sequence of hot and cold water flowing through a PDMS microchannel aligned of top of the device. With this, it is possible to apply fast temperature changes above of the pyroelectric device and then produced currents proportional to the temperature derivative.
Keywords :
electrochemical electrodes; lead compounds; microchannel flow; microfabrication; microsensors; polymers; printing; pyroelectric detectors; silver; thick film sensors; Ag-PZT-Ag; PDMS microchannel; SiO2; cold water sequence; glass substrate; hot water sequence; pyroelectric PZT sensor; pyroelectric thick film element stacking; screen printing; silver electrode; size 50 mum; thermal loading; Glass; Plasma temperature; Pyroelectric devices; Substrates; Temperature measurement; Temperature sensors; PZT; energy harvesting; piezoelectrics; pyroelectrics; screen printing;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on
Conference_Location :
Barcelona
Print_ISBN :
978-1-4673-4477-7
