Pyroelectric PZT sensors screen printed on glass

Author

Charlot, Benoit ; Coudouel, D. ; Combette, P. ; Giani, Annarita

Author_Institution

Inst. d´Electonique du Sud, Univ. Montpellier 2, Montpellier, France

fYear

2013

fDate

16-18 April 2013

Firstpage

1

Lastpage

5

Abstract

We present a pyroelectric device made from PZT screen printed on glass substrate. The pyroelectric thick film element is made of a stack of 50 μm PZT between silver electrodes. The device is placed under thermal load by a stream made of a sequence of hot and cold water flowing through a PDMS microchannel aligned of top of the device. With this, it is possible to apply fast temperature changes above of the pyroelectric device and then produced currents proportional to the temperature derivative.

Keywords

electrochemical electrodes; lead compounds; microchannel flow; microfabrication; microsensors; polymers; printing; pyroelectric detectors; silver; thick film sensors; Ag-PZT-Ag; PDMS microchannel; SiO₂; cold water sequence; glass substrate; hot water sequence; pyroelectric PZT sensor; pyroelectric thick film element stacking; screen printing; silver electrode; size 50 mum; thermal loading; Glass; Plasma temperature; Pyroelectric devices; Substrates; Temperature measurement; Temperature sensors; PZT; energy harvesting; piezoelectrics; pyroelectrics; screen printing;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on

Conference_Location

Barcelona

Print_ISBN

978-1-4673-4477-7

Type

conf

Filename

6559444