Title :
Simulation and design of micro pressure sensors applied to measure the intracranial pressure
Author :
Pang Bo ; Zhang Zhao-Hua ; Ren Tian-Ling
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
This paper reports a micrometer level pressure sensor to measure the intracranial pressure (ICP). The sensor is based on the piezoresistive effect. The piezoresistive pressure sensor is simulated and designed by using nonlinear programming Optimizing and Finite Element Analysis (FEA) tools. The sensor is fabricated by MEMS process. From tests, the sensor samples performances match up the design.
Keywords :
bioMEMS; biomedical measurement; finite element analysis; microfabrication; microsensors; piezoresistive devices; pressure sensors; MEMS process; finite element analysis; intracranial pressure measurement; micrometer level pressure sensor; micropressure sensor design; micropressure sensor simulation; nonlinear programming optimizing tools; piezoresistive effect; piezoresistive pressure sensor; sensor fabrication; Intracranial pressure sensors; Iterative closest point algorithm; Optical sensors; Piezoresistance; Programming; Stress; ICP; MEMS; design; sensor; simulation;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559695
