Simulation and design of micro pressure sensors applied to measure the intracranial pressure

Author

Pang Bo ; Zhang Zhao-Hua ; Ren Tian-Ling

Author_Institution

Inst. of Microelectron., Tsinghua Univ., Beijing, China

fYear

2013

fDate

7-10 April 2013

Firstpage

120

Lastpage

123

Abstract

This paper reports a micrometer level pressure sensor to measure the intracranial pressure (ICP). The sensor is based on the piezoresistive effect. The piezoresistive pressure sensor is simulated and designed by using nonlinear programming Optimizing and Finite Element Analysis (FEA) tools. The sensor is fabricated by MEMS process. From tests, the sensor samples performances match up the design.

Keywords

bioMEMS; biomedical measurement; finite element analysis; microfabrication; microsensors; piezoresistive devices; pressure sensors; MEMS process; finite element analysis; intracranial pressure measurement; micrometer level pressure sensor; micropressure sensor design; micropressure sensor simulation; nonlinear programming optimizing tools; piezoresistive effect; piezoresistive pressure sensor; sensor fabrication; Intracranial pressure sensors; Iterative closest point algorithm; Optical sensors; Piezoresistance; Programming; Stress; ICP; MEMS; design; sensor; simulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on

Conference_Location

Suzhou

Electronic_ISBN

978-1-4673-6351-8

Type

conf

DOI

10.1109/NEMS.2013.6559695

Filename

6559695