Title :
Study of polymeric MEMS micro-pump actuated by PZT bimorph
Author :
Yi Luo ; Xianglong Yin ; Xiaodong Wang ; Zongbo Zhang
Author_Institution :
Key Lab. for Micro/Nano Technol. & Syst. of Liaoning Province, Dalian Univ. of Technol., Dalian, China
Abstract :
Check valve micro-pump is easy to reach high flow rate and has a promising application prospect in micro fluidic devices and artificial organs. There are several vibration elements in check valve pump, including actuator, membrane and valves. The vibration performances of these elements have a coupling influence on the performance of micro-pump. In this paper, the comprehensive analysis was carried out using finite element model. Four kinds of micro-pumps with different valves and actuators were designed and fabricated. The performances of each kind of micro-pumps are studied by frequency sweeping experiments. Experimental results approximately coincide with the theoretical analysis. This research provides a theoretical and experimental basis for subsequent micro-pump design.
Keywords :
artificial organs; electron tubes; finite element analysis; lead compounds; membranes; microactuators; microfabrication; microfluidics; micropumps; microvalves; titanium compounds; vibrations; zirconium compounds; PZT; PZT bimorph; actuator; artificial organs; check valve micropump design; finite element model; flow rate; frequency sweeping experiments; microfluidic devices; polymeric MEMS micropump actuator; vibration elements; vibration performances; Actuators; Harmonic analysis; Micropumps; Resonant frequency; Valves; Vibrations; PZT bimorph; finite element models; micropump; vibration performance;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559720
