Title :
A micromachined monolithic 3 axis accelerometer based on convection heat transfer
Author :
Leyue Jiang ; Yongyao Cai ; Haidong Liu ; Yang Zhao
Author_Institution :
MEMSIC Inc., Andover, MA, USA
Abstract :
In this paper, a monolithic 3 axis thermal accelerometer has been developed based on standard CMOS process. This 3 axis thermal accelerometer use exactly the same sensor area and manufacturing process as 2 axis thermal accelerometer reported in the past. It is easy to mass produce and has low cost, small size.
Keywords :
CMOS integrated circuits; accelerometers; convection; micromachining; Micromachined monolithic 3 axis thermal accelerometer; convection heat transfer; manufacturing process; sensor area; standard CMOS process; Acceleration; Accelerometers; Cavity resonators; Heating; Sensitivity; Temperature sensors; CMOS; monolithic; sensitivity; thermal accelerometer;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559725
