Advances of CMOS-MEMS technology for resonator applications

This paper reports on recent progress on high-Q integrated micromechanical resonators using “CMOS-MEMS technology” to enable monolithic integration of MEMS and CMOS. Specifically, we take advantage of IC and semiconductor strength in Taiwan to develop several CMOS-MEMS resonator platforms targeted for inherent integration of MEMS and circuitry towards single-chip implementation for timing reference and oscillator applications. In addition, performance enhancement in terms of motional impedance, power handling, linearity, thermal stability, frequency tunability, quality factor, and feedthrough level have been addressed.