Title :
Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling
Author :
Legrain, A. ; Janson, T.G. ; Berenschot, J.W. ; Krijnen, G.J.M. ; Abelmann, Leon ; Tas, Niels R.
Author_Institution :
MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands
Abstract :
We present the controllable capillary folding of planar silicon nitride templates into 3D micro-structures by means of through-wafer liquid application. We demonstrate for the first time hydro-mechanical, repeatable, actuation of capillary folded structures via addition or retraction of water on demand.
Keywords :
capillarity; crystal microstructure; deformation; elasticity; silicon compounds; SiN; capillary folded structure actuation; controllable elastocapillary folding; hydromechanical repeatable actuation; silicon nitride 3D microstructures; through-wafer liquid application; water retraction; Electron tubes; Fabrication; Fasteners; Liquids; Metals; Silicon; Surface tension;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559787
