• DocumentCode
    619006
  • Title

    Research on programmable capillary-force self-assembly nanofabrication

  • Author

    Shuhua Wei ; Jing Zhang

  • Author_Institution
    Dept. of Microelectron., North China Univ. of Technol., Beijing, China
  • fYear
    2013
  • fDate
    7-10 April 2013
  • Firstpage
    574
  • Lastpage
    577
  • Abstract
    The capillary-force which is an extremely important force in the small objects is considered to be one of the most effective driving forces for the micro-nanoscale self-assembly. However, the process of capillary-force self-assembly is usually uncontrollable, which has prevented it from being used in the formation of specific nanoscale devices. In order to explore the fundamentals of capillary-force self-assembly, we analyzed the impact factors of nanostructures suffered by capillary-force and gave a typical general physical model. Then, we studied the complex structures fabrication method based on capillary-force self-assembly, and analyzed its characteristics and limitations. Finally, we proposed a new concept of programmable capillary-force self-assembly to achieve a reliable control of capillary-force, and thus form a new nanofabrication method.
  • Keywords
    capillarity; micromechanical devices; nanoelectromechanical devices; nanofabrication; self-assembly; complex structure fabrication method; general physical model; microscale self-assembly; nanoscale devices; nanostructure impact factors; programmable capillary-force self-assembly nanofabrication process; Fabrication; Force; Liquids; Lithography; Nanobioscience; Nanostructures; Self-assembly; capillary-force; nanofabrication; self-assembly;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
  • Conference_Location
    Suzhou
  • Electronic_ISBN
    978-1-4673-6351-8
  • Type

    conf

  • DOI
    10.1109/NEMS.2013.6559796
  • Filename
    6559796