DocumentCode :
619006
Title :
Research on programmable capillary-force self-assembly nanofabrication
Author :
Shuhua Wei ; Jing Zhang
Author_Institution :
Dept. of Microelectron., North China Univ. of Technol., Beijing, China
fYear :
2013
fDate :
7-10 April 2013
Firstpage :
574
Lastpage :
577
Abstract :
The capillary-force which is an extremely important force in the small objects is considered to be one of the most effective driving forces for the micro-nanoscale self-assembly. However, the process of capillary-force self-assembly is usually uncontrollable, which has prevented it from being used in the formation of specific nanoscale devices. In order to explore the fundamentals of capillary-force self-assembly, we analyzed the impact factors of nanostructures suffered by capillary-force and gave a typical general physical model. Then, we studied the complex structures fabrication method based on capillary-force self-assembly, and analyzed its characteristics and limitations. Finally, we proposed a new concept of programmable capillary-force self-assembly to achieve a reliable control of capillary-force, and thus form a new nanofabrication method.
Keywords :
capillarity; micromechanical devices; nanoelectromechanical devices; nanofabrication; self-assembly; complex structure fabrication method; general physical model; microscale self-assembly; nanoscale devices; nanostructure impact factors; programmable capillary-force self-assembly nanofabrication process; Fabrication; Force; Liquids; Lithography; Nanobioscience; Nanostructures; Self-assembly; capillary-force; nanofabrication; self-assembly;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
Type :
conf
DOI :
10.1109/NEMS.2013.6559796
Filename :
6559796
Link To Document :
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