Title :
Fabrication of silica opal array with high mechanical strength
Author :
Hui Li ; Wei Wang ; Huaiqiang Yu ; Renxin Wang ; Zewen Wei ; Zhihong Li
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Abstract :
This paper focuses on fabrication of opal structures by self-assembling silica spheres, which can be used as an array of high throughput and low cost reactors or micro-filters. The reactors can carry out hundreds different reactions in parallel; while there is about 50 nano-liter reagent consumed in each reactor. It not only provides large surface area for reaction, but also solves the issue of high throughput experiments. The mechanical strength of the opal has to be high enough to withstand fluid flushing during sample loading and cleaning. In this paper, the optimized process is developed to fabricate the robust and crack-less opal membrane.
Keywords :
cracks; mechanical strength; nanofabrication; nanostructured materials; self-assembly; silicon compounds; SiO2; crackless opal membrane; fluid flushing; high throughput microfilter array; high throughput reactor array; opal mechanical strength; opal structure fabrication; optimized process; self-assembly; silica opal array fabrication; silica spheres; surface area; Arrays; Atmosphere; Fabrication; Inductors; Self-assembly; Silicon compounds; Surface treatment; high throughput; robust; self-assemble; silica opal;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559819