Fabrication of three-dimensional metallic microcomponents in fused silica by a femtosecond laser & micromoulding (FLM) method

Three-dimensional (3D) metallic microdevices are essential for the micro-electromechanical systems (MEMS) and microfluidic applications. In this paper, a femtosecond laser based micromoulding (FLM) method is employed to fabricate 3D metallic conductive microcomponents in fused silica. 3D microcavities/ microchannels in fused silica, which are served as the molds of metallic microcomponents, are fabricated by taking full advantage of the improved femtosecond laser irradiation followed by chemical etching (FLICE) technology. Solid metallic conductive microcomponents are then achieved in the 3D micromolds by injecting liquid metal with a microfluidic-compatible micromoulding device and solidifying the liquid metal. The FLM technology consists of a facile and maskless fabricating procedure, and enables convenient application of the inherently aligned 3D metallic microcomponents in microfluidic systems.