Title :
Design, simulation and fabrication of a micromachined cantilever-based flow sensor
Author :
Pei Chen ; Yulong Zhao ; Yiyao Li
Author_Institution :
State Key Lab. for Manuf. Syst. Eng., Xi´an Jiaotong Univ., Xi´an, China
Abstract :
A micromachined cantilever-based flow sensor is designed, depending on the detection of surface strain on the cantilever caused by the mass flow. In the continuous flow mode, the deflection of cantilever is directly proportional to the flow rate. The working mechanism of the strain beam in the flow sensor is analyzed, and the finite element method(FEM) is used to investigate the structural deformation and stress distribution, and the FLUENT is used to analysis the coupling characteristics between the fluid and solid. According to the simplified stress analysis and simulation results, the flow sensor has a sufficient structural strength within its measure range of 10 to 200ml/min, and will achieve ideal static characteristics that meet the requirements of practical applications. By varying the design of the cantilever, the measurement range and sensitivity of the sensor can be changed.
Keywords :
cantilevers; deformation; finite element analysis; flow sensors; micromachining; sensitivity analysis; FEM; FLUENT; cantilever deflection; continuous flow mode; coupling characteristics; finite element method; mass flow; measurement range; micromachined cantilever-based flow sensor design; micromachined cantilever-based flow sensor fabrication; micromachined cantilever-based flow sensor simulation; sensor sensitivity; strain beam; stress analysis; stress distribution; structural deformation; surface strain; Bridge circuits; Fabrication; Finite element analysis; Fluids; Simulation; Strain; Stress; MEMS; cantilever; differential pressure; flow mesurement; simulation;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559821
