Robotic nanowire handling for prototypic NEMS switching and resonator devices

In this paper the usage of a nanorobotic handling technique is presented for the transfer of individual nanowires with diameters of several 100 nanometers and length of about 10 μm. Both, handling and assembly take place inside a SEM and use electron beam induced deposition (EBiD) as well as focused ion beam (FIB) milling. The handled nanowires are used to assembly a NEMS device, namely an electrostatic switch design and a resonator, where the nanowire acts as switching contact and resonant component, respectively. Feasibility, working principle, reproducibility and specific values of the switches are investigated, as well as the conductivity of the nanowires itself.