Superhydrophobic surface obtained using pyramidal PTFE film fabricated on RIE etched silicon

Author

Chul-Heum Baek ; Yao Litao ; Sung-Bo Seo ; Hwa-Min Kim ; Dae-Seung Pyo ; Pyo-Hwan Hong ; Jung-Hwa Oh ; Dae-Young Kong ; Chan-Seob Cho ; Jong-Hyun Lee ; In-Yong Eom ; Bonghwan Kim

Author_Institution

Dept. of Electron. Eng., Catholic Univ. of Daegu, Gyeongsan, South Korea

fYear

2013

fDate

7-10 April 2013

Firstpage

903

Lastpage

906

Abstract

We have developed a surface texturing process using a polytetrafluoroethylene coating with a pyramidal structure for obtaining superhydrophobic surfaces. In order to investigate the hydrophobic properties of the surface, we measured the contact angle and roughness values. The calculated roughness factor and root mean square roughness ranged from 2.47 to 2.6 and from 0.25 μm to 0.4 μm, respectively. The contact angle of a water droplet on the surface was greater than 150°; moreover, this angle was maintained for over 7 weeks. This observation implies that extremely low wettability is achievable on superhydrophobic surfaces.

Keywords

contact angle; drops; hydrophobicity; polymer films; surface roughness; surface texture; water; wetting; RIE etched silicon; Si; contact angle; polytetrafluoroethylene coating; pyramidal PTFE film; pyramidal structure; root mean square roughness; superhydrophobic surface; surface roughness; surface texturing process; water droplet; wettability; Films; Rough surfaces; Silicon; Surface contamination; Surface morphology; Surface roughness; Surface treatment; PTFE; RIE; superhydrophobic surface;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on

Conference_Location

Suzhou

Electronic_ISBN

978-1-4673-6351-8

Type

conf

DOI

10.1109/NEMS.2013.6559869

Filename

6559869