Title :
An electrostatically driven peristaltic micropump with an indium tin oxide electrode
Author :
Bonghwan Kim ; Ki Sung Lee ; Shannon, Mark A.
Author_Institution :
Dept. of Electron. Eng., Catholic Univ. of Daegu, Gyeongsan, South Korea
Abstract :
An electrostatically driven valveless double-sided peristaltic micropump with an indium tin oxide (ITO) transparent electrode has been developed for gas chromatography. In order to verify the motion of the pump, an ITO-ITO micropump was fabricated, and in order to measure flow rate, an ITO-Si micropump was fabricated. The micropump was fabricated on an ITO on glass substrate and a silicon substrate with a polyimide membrane. A maximum flow rate of 27.19 μl/min was measured at 4 Hz and 100 V DC. The micropump was operated by 4 electrodes with a 4-phase sequencing actuation.
Keywords :
chromatography; electrostatic actuators; elemental semiconductors; indium compounds; membranes; microactuators; microelectrodes; microfabrication; micropumps; polymers; silicon; tin compounds; 4-phase sequencing actuation; ITO; ITO-ITO micropump; Si; electrostatically driven valveless double-sided peristaltic micropump; flow rate measurement; frequency 4 GHz; gas chromatography; glass substrate; indium tin oxide transparent electrode; polyimide membrane; silicon substrate; voltage 100 V; Coatings; Electrodes; Glass; Indium tin oxide; Micropumps; Polyimides; Silicon; 4 electrodes; Electrostatic; ITO; micropump;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559875
