Structure design and simulation of micro dynamically tuned gyroscope with three equilibrium rings

The structure of a micro dynamically tuned gyroscope (MDTG) with three equilibrium rings has been designed to eliminate the error caused by the double rotation frequency of the driving shaft like traditional DTG. Some simulations under the optimized structure parameters are given. The mode frequency is separated from 167Hz of the rotation frequency of the motor as simulated. The static deformation is controlled within less than 1μm under gravity and a load in our mechanical simulations. The dynamic deformation is simulated when the rotor rotates at a specified speed. The assembly distance between the electrode plates and the rotor disk is chosen from 40μm to 60μm after the static capacitance simulation.