Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators

Author

Wenjun Liao ; Wenjing Liu ; Yongming Tang ; Baobing Wang ; Huikai Xie

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA

fYear

2013

fDate

7-10 April 2013

Firstpage

969

Lastpage

972

Abstract

This paper presents the design, fabrication and characterization of a novel tip-tilt-piston (TTP) scanning micromirror based on an array of folded piezoelectric unimorph actuators. The micromirror can perform rotational scan around two in-plane orthogonal axes as well as out-of-plane piston motion. The measured resonant frequencies of the fabricated micromirror are 362 Hz (piston), 685 Hz (x axis scan), 1250 Hz (y axis scan) and 19.2 kHz (fast y axis scan), respectively.

Keywords

microfabrication; micromirrors; optical design techniques; optical fabrication; optical rotation; piezoelectric actuators; pistons; TTP scanning micromirror; folded PZT unimorph actuators; folded piezoelectric unimorph actuator array; frequency 19.2 kHz; frequency 362 Hz to 1250 Hz; in-plane orthogonal axes; out-of-plane piston motion; resonant frequencies; rotational scan; tip-tilt-piston piezoelectric micromirror; x axis scan; y axis scan; Actuators; Arrays; Electrodes; Micromirrors; Optical device fabrication; Pistons; Folded Actuators; Micromirror; Piezoelectric; TTP;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on

Conference_Location

Suzhou

Electronic_ISBN

978-1-4673-6351-8

Type

conf

DOI

10.1109/NEMS.2013.6559884

Filename

6559884