Title :
A triaxial monolithic silicon accelerometer with improved temperature characteristics
Author :
Peng Chen ; Dingbang Xiao ; Zhihua Chen ; Ye Yuan ; Xinghua Wang ; Songqi Hu ; Yulie Wu
Author_Institution :
Coll. of Mechatron. & Autom., Nat. Univ. of Defense Technol., Changsha, China
Abstract :
A novel triaxial monolithic silicon accelerometer with improved temperature characteristics is presented in this paper. Two methods were put forward to improve the temperature characteristics of the accelerometer. One is the optimization of the anchor configuration to decrease the temperature drift, and the other is the integration of an on-chip matching capacitor to counteract capacitance variation. A facile micromachined process flow was investigated, and the differential capacitance readout circuit was setup. The FEM simulations and experimental results prove that the methods are available and effective.
Keywords :
accelerometers; capacitors; elemental semiconductors; finite element analysis; flow measurement; integration; micromachining; optimisation; silicon; FEM simulations; Si; anchor configuration; capacitance variation; differential capacitance readout circuit; facile micromachined process flow; integration; on-chip matching capacitor; optimization; temperature characteristics; temperature drift; triaxial monolithic silicon accelerometer; Acceleration; Accelerometers; Capacitance; Capacitors; Silicon; Temperature; Temperature sensors; anchor configuration; on-chip matching capacitor; temperature characteristics; triaxial accelerometer;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559892
