Title :
Nanostructure fabricated by laser direct writing with water droplets
Author :
Chang, Y.J. ; Chang, C. Hwa ; Ho, Chian C. ; Hsu, J.C. ; Kuo, C.L.
Author_Institution :
Dept. of Mech. Eng., Nat. Yunlin Univ. of Sci. & Technol., Douliou, Taiwan
Abstract :
Nanopatterning using near-field optics has shown great potential for industrial applications. A novel application of water droplets to this technology is proposed in this study. With a hydrophobic layer and controlled substrate temperature, a layer of randomly distributed water droplets with a high contact angle is formed on the substrate. These liquid droplets can be used as lenses to enhance the laser intensity at the bottom of the droplets. As a result, nanoscale holes can be formed on the substrate by laser ablation. We have fabricated holes with a diameter of 500nm at the substrate temperature of 12°C. The depth of the holes ranges from 0.1μm to 0.9μm, depending on the diameter of droplets.
Keywords :
drops; laser ablation; nanofabrication; nanopatterning; nanostructured materials; contact angle; controlled substrate temperature; droplet bottom; droplet diameter; hole depth; hydrophobic layer; industrial applications; laser ablation; laser direct writing; laser intensity; lenses; liquid droplets; nanopatterning; nanoscale holes; nanostructure; near-field optics; randomly distributed water droplet layer; size 0.1 mum to 0.9 mum; size 500 nm; temperature 12 degC; water droplet application; Decision support systems; Laser ablation; Liquids; Optics; Optimized production technology; Substrates; Temperature control; Droplets; Laser; Nanopatterning;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559896
