Title :
An optimized geometry model for the micro-machined liquid-suspended rotor gyroscope
Author :
Haifeng Zhang ; Nan Chen ; Xiaowei Liu ; Xiaoshu Zhang ; Hai Li
Author_Institution :
MEMS Center, Harbin Inst. of Technol., Harbin, China
Abstract :
The levitation of the rotor eliminates mechanical friction resulting in high sensitivity for micro-gyroscope, Theoretically. However, the rotor stability is difficult to control due to the rotor´s small size. Its performance can not rival vibratory gyroscope at present. In this paper a novel micromachined liquid-suspended rotor micro-gyroscope is proposed, whose stability is improved by liquid suspension. The magnetic field mode of micro-gyroscope is established to analyze the distribution of magnetic field and calculate the driving torque of the rotor. The structure of driving stator is optimized. The flow field model is established to optimize the rotor radius. Using optimized geometry model, the maximum rotational speed of the rotor is 23920rpm.
Keywords :
gyroscopes; micromachining; microsensors; rotors; stability; stators; driving stator structure; driving torque; flow field model; magnetic field distribution analysis; magnetic field mode; mechanical friction; micromachined liquid-suspended rotor microgyroscope; optimized geometry model; rotor levitation; rotor radius; rotor small size; rotor stability; vibratory gyroscope; Coils; Gyroscopes; Magnetic fields; Magnetic liquids; Rotors; Torque; Velocity control; micro gyroscope; model; moment; rotor; stator;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559901
