Development of flexible neural probes using SU-8/parylene

Author

Zhuolin Xiang ; Hao Wang ; Songsong Zhang ; Shih-Cheng Yen ; Minkyu Je ; Wei Mong Tsang ; Yong-Ping Xu ; Thakor, Nitish V. ; Dim-Lee Kwong ; Chengkuo Lee

Author_Institution

Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore

fYear

2013

fDate

7-10 April 2013

Firstpage

1076

Lastpage

1079

Abstract

A new process for making SU-8 neural probe with fluidic channels and gold electrodes based on multilayered thin parylene and SU-8 is presented here. This approach can realize a thin 15 μm gap between electrode surface and neural cells. The thin gap will help to enhance the neural signal acquisition. Fluidic testing and mechanical testing are conducted to ensure the device reliability.

Keywords

biomechanics; biomedical electrodes; gold; mechanical testing; medical signal detection; medical signal processing; neurophysiology; polymers; reliability; Au; SU-8 neural probe; device reliability; electrode surface; flexible neural probes; fluidic channels; fluidic testing; gold electrodes; mechanical testing; multilayered thin SU-8-parylene; neural cells; neural signal acquisition; size 15 mum; Electrodes; Etching; Fabrication; Force; Polymers; Probes; Testing; Neural probe; SU-8; electrode; parylene;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on

Conference_Location

Suzhou

Electronic_ISBN

978-1-4673-6351-8

Type

conf

DOI

10.1109/NEMS.2013.6559908

Filename

6559908